Sensorix COF2 2 Carbonyl Fluoride Gas Sensor
Electrochemical carbonyl-fluoride sensor for semiconductor process monitoring; specialty gas.
Manufacturer: Sensorix GmbH (Germany)
Official Manufacturer Information
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Range and interfering-gas characteristics must be checked for the exact sensor code and current revision.
Original manufacturer model check
Manufacturer COF₂ 2 carbonyl-fluoride electrochemical OEM sensor covers 0–2 ppm; the published T90 is ≤120 s. COF₂ is carbonyl fluoride, not formaldehyde (CH₂O).
Sensorix COF₂ 2 — toxic process gas and response-time suitability
The COF₂ 2 is a three-electrode carbonyl-fluoride sensor for specialty/semiconductor process-gas safety. COF₂ is not CO₂, COCl₂ or CH₂O. Incorrect chemical identification could invalidate calibration and alarm functionality.
| Maker model specification | Why it matters |
|---|---|
| Measurement range 0–2 ppm COF₂ | Not a 0–2% volume range; demands appropriate low-ppm target-gas standards. |
| T90 ≤120 s | Component response may be critical to warning speed; include gas transport, filters, signal processing and alarm latency in hazard review. |
| Temperature −20 to +40°C | Ambient and gas background need validation for each semiconductor production line. |
| Three-electrode electrochemical cell, 4S/7S/Classic/Smart/Mini mechanical options | Needs separate readout electronics and exact packaging/EPROM interface selection, not a built-in Modbus/4–20mA transmitter. |
Safety qualification: Sensorix describes semiconductor and industrial applications; this does not establish detector ATEX/IECEx or personnel alarm performance. Test specificity, toxicity response requirements, maintenance, sensor replacement and combined system alarm latency.
Sensorix current COF₂ series · Sensorix manufacturer COF₂ technical introduction